Patent Assignment
Reel/Frame 062323/0586
Assignment of Assignor's Interest
Recorded: 2023-01-10
Pages: 8
Assignors
YE, ZHENG JOHN
Executed: 2022-11-03
LAM, ANDREW C.
Executed: 2022-11-07
ZHAO, ZEQIONG
Executed: 2022-11-03
ZHOU, JIANHUA
Executed: 2022-11-03
AN, HSHIANG
Executed: 2022-11-03
ANWAR, SUHAIL
Executed: 2022-11-03
NAKAJIMA, YOSHITAKE
Executed: 2022-11-03
CHANG, WILLIAM
Executed: 2022-11-03
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Impedance Control of Local Areas of a Substrate During Plasma Deposition Thereon in a Large Pecvd Chamber