Patent Assignment
Reel/Frame 062340/0873
Assignment of Assignor's Interest
Recorded: 2023-01-11
Pages: 3
Assignor
YAMAGUCHI, TAKAHIRO
Executed: 2023-01-05
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Inspection Apparatus, Substrate Inspection Method, and Recording Medium