Patent Assignment
Reel/Frame 062363/0921
Assignment of Assignor's Interest
Recorded: 2023-01-12
Pages: 8
Assignors
KAWAGUCHI, TAKUYA
Executed: 2022-12-28
HOTTA, TAKANOBU
Executed: 2023-01-10
YAMASAKI, HIDEAKI
Executed: 2022-12-27
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Method and Tungsten Film