Patent Assignment
Reel/Frame 062417/0755
Assignment of Assignor's Interest
Recorded: 2023-01-19
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method