Patent Assignment
Reel/Frame 062463/0331
Assignment of Assignor's Interest
Recorded: 2023-01-24
Pages: 2
Assignor
YOSHIDA, YUKIFUMI
Executed: 2022-12-07
Assignee
SCREEN HOLDINGS CO., LTD.
1-1, TENJINKITA-MACHI, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method, Substrate Processing Apparatus, and Processing Liquid