Patent Assignment
Reel/Frame 062579/0979
Assignment of Assignor's Interest
Recorded: 2023-02-03
Pages: 4
Assignors
YAO, CHIEN NING
Executed: 2020-10-05
YOUNG, BO-FENG
Executed: 2020-10-06
YEONG, SAI-HOOI
Executed: 2020-10-12
CHENG, KUAN-LUN
Executed: 2020-10-12
WANG, CHIH-HAO
Executed: 2020-10-12
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Air Gap in Inner Spacers and Methods of Fabricating the Same in Field-Effect Transistors