Patent Assignment
Reel/Frame 062589/0807
Assignment of Assignor's Interest
Recorded: 2023-02-03
Pages: 4
Assignors
MOPIDEVI, HEMA SWAROOP
Executed: 2021-06-14
CHEN, LEE
Executed: 2021-06-15
ANDERSON, THOMAS W.
Executed: 2021-06-14
SMITH, SHAUN TYLER
Executed: 2021-06-14
BENJAMIN, NEIL M.P.
Executed: 2021-06-14
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Control of Plasma Formation by Rf Coupling Structures