Patent Assignment
Reel/Frame 062788/0584
Assignment of Assignor's Interest
Recorded: 2023-02-23
Pages: 3
Assignors
DILLEN, HERMANUS ADRIANUS
Executed: 2019-01-14
TEL, WIM TJIBBO
Executed: 2019-01-14
VAN MIERLO, WILLEM LOUIS
Executed: 2019-01-14
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method for Calibrating a Scanning Charged Particle Microscope