Patent Assignment
Reel/Frame 062817/0085
Assignment of Assignor's Interest
Recorded: 2023-02-27
Pages: 9
Assignors
LIU, XIUMEI
Executed: 2020-05-01
CAO, KAI
Executed: 2020-07-20
WALLINGFORD, RICHARD
Executed: 2020-05-04
GIUSTI, MATTHEW
Executed: 2020-05-09
BRUGUIER, BROOKE
Executed: 2020-05-05
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Automated Focusing System For Tracking Specimen Surface with a Configurable Focus Offset
Application:
18/114,859 →
Publication:
US 2023/0204934