Patent Assignment
Reel/Frame 062932/0097
Assignment of Assignor's Interest
Recorded: 2023-03-09
Pages: 3
Assignor
GOSHI, GENTARO
Executed: 2023-02-27
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing System