Patent Assignment
Reel/Frame 062976/0136
Assignment of Assignor's Interest
Recorded: 2023-03-14
Pages: 10
Assignors
GDOR, ITAY
Executed: 2023-01-31
LUBASHEVSKY, YUVAL
Executed: 2023-01-30
LEVINSKI, VLADIMIR
Executed: 2023-01-30
NEGRI, DARIA
Executed: 2023-01-30
YAGIL, ALON
Executed: 2023-03-02
ISAKOVICH, NICKOLAI
Executed: 2023-01-30
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Suppression of Tool Induced Shift in Scanning Overlay Metrology
Application:
18/099,798 →
Publication:
US 2024/0167813