Patent Assignment
Reel/Frame 063179/0927
Assignment of Assignor's Interest
Recorded: 2023-03-30
Pages: 5
Assignors
WEIDMAN, TIMOTHY WILLIAM
Executed: 2021-05-21
GU, KEVIN LI
Executed: 2021-03-25
WU, CHENGHAO
Executed: 2021-03-24
NARDI, KATIE LYNN
Executed: 2021-03-26
VOLOSSKIY, BORIS
Executed: 2021-03-24
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Pre-Exposure Photoresist Curing to Enhance Euv Lithographic Performance