Patent Assignment
Reel/Frame 063367/0892
Assignment of Assignor's Interest
Recorded: 2023-04-18
Pages: 3
Assignors
SHARMA, KASHISH
Executed: 2021-09-27
LEMAIRE, PAUL C.
Executed: 2021-09-28
HAUSMANN, DENNIS M.
Executed: 2021-09-27
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Selective Deposition of Metal Oxides Using Silanes as an Inhibitor