Patent Assignment
Reel/Frame 063390/0680
Assignment of Assignor's Interest
Recorded: 2023-04-20
Pages: 8
Assignors
HOINKIS, OTTMAR
Executed: 2023-04-01
GUENTNER, JAN
Executed: 2023-03-30
RHINOW, DANIEL
Executed: 2023-03-30
MARBACH, HUBERTUS
Executed: 2023-04-05
AUTH, NICOLE
Executed: 2023-04-02
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Apparatus for Analyzing and/or Processing a Sample with a Particle Beam and Method