Patent Assignment
Reel/Frame 063537/0745
Assignment of Assignor's Interest
Recorded: 2023-05-04
Pages: 3
Assignee
AUROS TECHNOLOGY, INC.
#15-23, DONGTANSANDAN 6-GIL, DONGTAN-MYEON, HWASEONG-SI, GYEONGGI-DO, 18487, KOREA, REPUBLIC OF
Covered Property
(1)
Overlay Mark Forming Moire Pattern, Overlay Measurement Method Using Same, Overlay Measurement Apparatus Using Same, and Manufacturing Method of Semiconductor Device Using Same