Patent Assignment
Reel/Frame 063567/0353
Assignment of Assignor's Interest
Recorded: 2023-05-08
Pages: 5
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Metrology Target for One-Dimensional Measurement of Periodic Misregistration
Application:
18/144,540 →
Publication:
US 2024/0035812