Patent Assignment
Reel/Frame 063612/0328
Assignment of Assignor's Interest
Recorded: 2023-05-11
Pages: 3
Assignors
WANG, CHIA-HSI
Executed: 2023-01-06
CHEN, YEN-YU
Executed: 2023-01-06
CHO, JUI-MU
Executed: 2023-01-09
LIAO, CHUNG HSIEN
Executed: 2023-01-09
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
System and Method of Monitoring Precursor Tank