Patent Assignment
Reel/Frame 063627/0983
Assignment of Assignor's Interest
Recorded: 2023-05-12
Pages: 10
Assignors
IGARASHI, KAZUMASA
Executed: 2023-05-09
TONEGAWA, YAMATO
Executed: 2023-05-09
OGAWA, JUN
Executed: 2023-05-09
TANAKA, YUKI
Executed: 2023-05-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus for Etching Using Oxdization