Patent Assignment
Reel/Frame 063716/0922
Assignment of Assignor's Interest
Recorded: 2023-05-22
Pages: 3
Assignors
ZI, AN-REN
Executed: 2019-10-18
LIU, CHEN-YU
Executed: 2019-10-18
CHANG, CHING-YU
Executed: 2019-10-18
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Euv Photoresist With Low-Activation-Energy Ligands Or High-Developer-Solubility Ligands