Patent Assignment
Reel/Frame 063878/0800
Assignment of Assignor's Interest
Recorded: 2023-06-07
Pages: 10
Assignors
SASAKI, HIKOICHIRO
Executed: 2023-05-16
GUO, SHIRONG
Executed: 2023-05-16
IKEDA, TAKENOBU
Executed: 2023-05-16
KON, YOSHIMITSU
Executed: 2023-05-16
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus