Patent Assignment
Reel/Frame 064018/0527
Assignment of Assignor's Interest
Recorded: 2023-06-21
Pages: 4
Assignee
SHIBAURA MECHATRONICS CORPORATION
5-1, KASAMA 2-CHOME, SAKAE-KU, YOKOHAMA-SHI, KANAGAWA, 247-8610, JAPAN
Covered Property
(1)
Substrate Processing Apparatus