Patent Assignment
Reel/Frame 064158/0033
Assignment of Assignor's Interest
Recorded: 2023-07-05
Pages: 6
Assignors
YAMAGUCHI, KUNIAKI
Executed: 2015-08-17
KOBATA, ITSUKI
Executed: 2015-08-17
MIZUNO, TOSHIO
Executed: 2015-08-17
MIYAZAKI, MITSURU
Executed: 2015-08-17
TOYOMURA, NAOKI
Executed: 2015-08-17
INOUE, TAKUYA
Executed: 2015-08-17
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Apparatus