Patent Assignment
Reel/Frame 064220/0484
Assignment of Assignor's Interest
Recorded: 2023-07-12
Pages: 3
Assignors
YANG, LI-PO
Executed: 2020-08-28
LAI, WEI-HAN
Executed: 2020-08-28
CHANG, CHING-YU
Executed: 2020-08-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist Composition and Method of Forming Photoresist Pattern