Patent Assignment
Reel/Frame 064222/0306
Assignment of Assignor's Interest
Recorded: 2023-07-12
Pages: 4
Assignors
WU, SHENG-WEI
Executed: 2021-12-17
TSAI, YUNG-LI
Executed: 2021-12-21
CHEN, BO CHEN
Executed: 2020-07-04
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Apparatus and Method for Wafer Cleaning
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.