Patent Assignment
Reel/Frame 066544/0179
Assignment of Assignor's Interest
Recorded: 2024-02-23
Pages: 3
Assignor
CHEN, BO-CHEN, MR.
Executed: 2022-02-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Apparatus and Method for Wafer Cleaning
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.