Patent Assignment
Reel/Frame 064260/0463
Assignment of Assignor's Interest
Recorded: 2023-07-14
Pages: 3
Assignor
INATOMI, YUICHIRO
Executed: 2023-07-03
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method