Substrate processing apparatus and substrate processing method
A substrate processing apparatus includes a substrate holder, a rotational driving unit, a cover body, a transfer mechanism, a cleaning liquid supply and a controller. The substrate holder is configured to hold a substrate. The rotational driving unit is configured to rotate the substrate holder. The cover body is configured to cover a top surface of the substrate held by the substrate holder. The transfer mechanism is configured to transfer a cleaning jig to the substrate holder. The cleaning liquid supply is configured to supply a cleaning liquid toward a bottom surface of the cleaning jig held by the substrate holder. The controller is configured to control the rotational driving unit to rotate the substrate holder. The cleaning jig is provided with at least one hole through which the cleaning liquid discharged from the cleaning liquid supply passes toward the cover body.
1 . A cleaning method, comprising:
transferring a cleaning jig to a substrate holder allowed to hold a substrate;
rotating the substrate holder holding the cleaning jig thereon;
discharging a cleaning liquid toward a bottom surface of the cleaning jig held by the substrate holder; and
cleaning a cover body covering a top surface of the cleaning jig with the cleaning liquid,
wherein the cleaning jig comprises a plate member and the cleaning jig is provided with multiple holes through which the cleaning liquid discharged from a cleaning liquid supply passes toward the cover body, and
wherein the cleaning jig further comprises a plurality of blade members, each disposed between two adjacent ones of the multiple holes and extending in a radial direction of the plate member.