Patent Assignment
Reel/Frame 064356/0143
Assignment of Assignor's Interest
Recorded: 2023-07-24
Pages: 6
Assignors
SETIJA, IRWAN DANI
Executed: 2019-10-15
DEN BOEF, ARIE JEFFREY
Executed: 2020-05-04
BEUKMAN, ARJAN JOHANNES ANTON
Executed: 2019-10-11
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Systems, Coherence Scrambler Illumination Sources and Methods Thereof
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.