Patent Assignment
Reel/Frame 064495/0024
Assignment of Assignor's Interest
Recorded: 2023-08-04
Pages: 7
Assignors
CHEN, HSIANG-FU
Executed: 2020-06-29
HUNG, CHIA-MING
Executed: 2020-06-24
CHIU, I-HSUAN
Executed: 2020-06-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Semiconductor Device Comprising Different Types of Microelectromechanical Systems Devices