Patent Assignment
Reel/Frame 064497/0553
Assignment of Assignor's Interest
Recorded: 2023-08-04
Pages: 8
Assignors
YANAGI, YOSHIHIRO
Executed: 2023-06-28
ENDO, HIROKI
Executed: 2023-07-26
WU, TONG
Executed: 2023-06-28
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method