Patent Assignment
Reel/Frame 064535/0700
Assignment of Assignor's Interest
Recorded: 2023-08-09
Pages: 3
Assignor
MATSUDO, TATSUO
Executed: 2023-04-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Treatment Apparatus