Patent Assignment
Reel/Frame 064547/0666
Assignment of Assignor's Interest
Recorded: 2023-08-10
Pages: 4
Assignors
CHANG, KAI-CHIEH
Executed: 2021-08-15
HO, KAI-FA
Executed: 2021-07-12
CHEN, LI-JUI
Executed: 2021-07-22
LIU, HENG-HSIN
Executed: 2021-07-12
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD., 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Processing Tool and Methods of Operation