Patent Assignment
Reel/Frame 064828/0286
Assignment of Assignor's Interest
Recorded: 2023-09-07
Pages: 4
Assignors
YANG, LIU
Executed: 2022-03-04
LI, MENGPING
Executed: 2022-01-05
GHONGADI, SHANTINATH
Executed: 2022-01-05
PFAU, ANDREW JAMES
Executed: 2022-01-05
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Techniques for Optical Measurement of Thin Films
Application:
18/260,713 →
Publication:
US 2024/0055282