Patent Assignment
Reel/Frame 064853/0294
Assignment of Assignor's Interest
Recorded: 2023-09-09
Pages: 5
Assignors
DI, MING
Executed: 2023-08-03
ZHAO, QIANG
Executed: 2023-08-04
CHANG, YIH
Executed: 2023-08-14
ZHANG, TIANHAO
Executed: 2023-08-03
HU, DAWEI
Executed: 2023-08-04
CHEN, XI
Executed: 2023-08-03
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, COLORADO, 95035
Covered Property
(1)
Measurements Of Semiconductor Structures Based On Spectral Differences At Different Process Steps