Patent Assignment
Reel/Frame 064860/0278
Assignment of Assignor's Interest
Recorded: 2023-09-11
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Method
Application:
18/550,011 →
Publication:
US 2024/0153807