Patent Assignment
Reel/Frame 065013/0572
Assignment of Assignor's Interest
Recorded: 2023-09-25
Pages: 3
Assignors
TSENG, HSIN-FU
Executed: 2023-08-27
TU, CHIH-CHIANG
Executed: 2023-08-23
WEN, CHIH-WEI
Executed: 2023-08-23
LU, CHIEN-HSING
Executed: 2023-08-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Euv Source with Rotation Crucible and Laser and Tin (Sn) Auto-Filling Method