Patent Assignment
Reel/Frame 065066/0683
Assignment of Assignor's Interest
Recorded: 2023-09-28
Pages: 3
Assignors
TAVAKOLI, AMIR H.
Executed: 2023-08-23
LI, JIAN
Executed: 2023-08-23
REIMER, PETER
Executed: 2023-09-21
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Resistivity-Controlled Dielectric Materials for Substrate Supports with Improved High Temperature Chucking