Patent Assignment
Reel/Frame 065145/0117
Assignment of Assignor's Interest
Recorded: 2023-10-06
Pages: 5
Assignors
WEI, JING
Executed: 2023-07-04
ZHANG, YU
Executed: 2023-07-04
WEI, GANG
Executed: 2023-07-04
YANG, JING
Executed: 2023-07-04
WANG, GUIBIN
Executed: 2023-07-04
YUE, XIN
Executed: 2023-07-04
Assignee
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
NO.8 WENCHANG AVENUE, BEIJING ECONOMIC-TECHNOLOGICAL DEVELOPMENT AREA, BEIJING, 100176, CHINA
Covered Property
(1)
Power Adjustment Method of Upper Electrode Power Supply and Semiconductor Process Apparatus