Patent Assignment
Reel/Frame 065279/0879
Assignment of Assignor's Interest
Recorded: 2023-10-19
Pages: 3
Assignors
SILVEIRA, FERNANDO M.
Executed: 2016-08-01
ZHANG, CHUNLEI
Executed: 2016-07-22
CRIMINALE, PHILLIP
Executed: 2016-08-01
CHO, JAEYONG
Executed: 2016-08-02
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Advanced Temperature Control for Wafer Carrier in Plasma Processing Chamber