Patent Assignment
Reel/Frame 065347/0508
Assignment of Assignor's Interest
Recorded: 2023-10-25
Pages: 7
Assignors
SEKI, MASAYA
Executed: 2022-03-29
YAHAGI, MITSUTOSHI
Executed: 2022-03-30
YAMADA, NOBUYA
Executed: 2022-04-06
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Pre-Wet Module, Deaerated Liquid Circulation System, and Pre-Wet Method