Pre-wet module, deaerated liquid circulation system, and pre-wet method
A preprocess is efficiently performed on a substrate. A pre-wet module 200 includes a deaeration tank 210 , a processing device 258 , a substrate holder 220 , and a drive mechanism 230 . The deaeration tank 210 is configured to house a deaerated liquid. The processing device 258 includes a nozzle 268 configured to supply a cleaning liquid to a surface to be processed of a substrate having the surface to be processed facing upward. The substrate holder 220 is disposed between the deaeration tank 210 and the processing device 258 . The substrate holder 220 includes a first holding member 222 configured to hold a first substrate and a second holding member 224 configured to hold a second substrate. The drive mechanism 230 is configured to rotate and move up and down the substrate holder 220 . The drive mechanism 230 includes a rotation mechanism 240 and an elevating mechanism 248 . The rotation mechanism 240 is configured to rotate the substrate holder 220 between a first state where a surface to be processed of the first substrate is opposed to a deaerated liquid in the deaeration tank 210 and a second state where a surface to be processed of the second substrate is opposed to the deaerated liquid in the deaeration tank. The elevating mechanism 248 is configured to move up and down the substrate holder 220.
1. A pre-wet method comprising:
a first deaeration step of performing a deaeration process by positioning a first substrate at a first position and immersing a surface to be processed of the first substrate downwardly in the deaerated liquid;
a first cleaning step of supplying a cleaning liquid to a surface to be processed of a second substrate in a state where the second substrate is positioned at a second position and the surface to be processed of the second substrate faces upward concurrently with performing of the first deaeration step;
a rotation step of rotating the first substrate and the second substrate to position the second substrate at the first position after the first deaeration step and the first cleaning step;
a second deaeration step of performing a deaeration process by immersing the surface to be processed of the second substrate downwardly in the deaerated liquid after the rotation step; and
a second cleaning step of supplying a cleaning liquid to a surface to be processed of a third substrate in a state where the surface to be processed of the third substrate faces upward at the second position concurrently with performing of the second deaeration step.
2. The pre-wet method according to claim 1 , further comprising
a step of forming a flow of the deaerated liquid radially expanding from a center of the surface to be processed of the substrate immersed in the deaerated liquid concurrently with performing of the first deaeration step or the second deaeration step.
3. The pre-wet method according to claim 1 , further comprising:
an imaging step of taking an image of the surface to be processed of the substrate immersed in the deaerated liquid concurrently with performing of the first deaeration step or the second deaeration step; and
a determination step of determining a deaeration state of the surface to be processed of the substrate based on the image taken in the imaging step.
4. The pre-wet method according to claim 1 , further comprising
a stirring step of stirring the deaerated liquid concurrently with performing of the first deaeration step or the second deaeration step.