Patent Assignment
Reel/Frame 065500/0682
Assignment of Assignor's Interest
Recorded: 2023-11-08
Pages: 4
Assignor
LIN, YUN-YUE
Executed: 2018-05-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Extreme Ultraviolet Mask and Method of Manufacturing the Same