Patent Assignment
Reel/Frame 065669/0876
Assignment of Assignor's Interest
Recorded: 2023-11-27
Pages: 4
Assignee
USHIO DENKI KABUSHIKI KAISHA
1-6-5, MARUNOUCHI, CHIYODA-KU, TOKYO, 100-8150, JAPAN
Covered Property
(1)
Illumination Optical System, Exposure Apparatus, Irradiation Method, and Component Manufacturing Method