Patent Assignment
Reel/Frame 065766/0764
Assignment of Assignor's Interest
Recorded: 2023-12-05
Pages: 3
Assignor
YADANI, YUSUKE
Executed: 2022-09-12
Assignee
MITSUBISHI ELECTRIC CORPORATION
7-3, MARUNOUCHI 2-CHOME, CHIYODA-KU, TOKYO, 100-8310, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Apparatus and Method of Manufacturing Semiconductor Device
Application:
18/529,434 →
Publication:
US 2024/0105472