Patent Assignment
Reel/Frame 065816/0691
Assignment of Assignor's Interest
Recorded: 2023-12-08
Pages: 4
Assignee
RESONAC CORPORATION
9-1, HIGASHI-SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 1057325, JAPAN
Covered Property
(1)
Dry Etching Method, Method for Producing Semiconductor Element, and Cleaning Method
Application:
18/568,637 →
Publication:
US 2024/0282583
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.