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Patent Application Utility PCT National Stage
App. No. 18/568,637 · Confirmation No. 2966

DRY ETCHING METHOD, METHOD FOR PRODUCING SEMICONDUCTOR ELEMENT, AND CLEANING METHOD

Applicant: RESONAC CORPORATION
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Quick Facts
App. No.
18/568,637
Filed
2023-12-08
Pub. No.
US20240282583A1
Examiner
LEIJA, JAMES
Art Unit
3974