Patent Assignment
Reel/Frame 066420/0430
Assignment of Assignor's Interest
Recorded: 2024-02-08
Pages: 4
Assignors
YANG, WENBING
Executed: 2020-06-04
BROURI, MOHAND
Executed: 2020-06-08
TAN, SAMANTHA SIAMHWA
Executed: 2020-06-05
LEE, SHIH-KED
Executed: 2020-06-04
FAN, YIWEN
Executed: 2020-06-04
CHOI, WOOK
Executed: 2020-06-04
MUKHERJEE, TAMAL
Executed: 2020-06-04
LIN, RAN
Executed: 2020-06-07
PAN, YANG
Executed: 2020-06-04
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etching for Subtractive Metal Etch