Patent Assignment
Reel/Frame 066497/0452
Assignment of Assignor's Interest
Recorded: 2024-02-20
Pages: 18
Assignors
SAKATA, YOJI
Executed: 2024-01-09
KATSUKI, SHINGO
Executed: 2024-01-10
FUJISE, RYOHEI
Executed: 2024-01-09
MATSUYAMA, KENICHIROU
Executed: 2024-01-09
TAKAKI, SHINSUKE
Executed: 2024-01-22
IWAKI, HIROYUKI
Executed: 2024-01-09
TADATOMO, HIROKI
Executed: 2024-01-09
ONITSUKA, TOMOYA
Executed: 2024-01-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method