Patent Assignment
Reel/Frame 066525/0616
Assignment of Assignor's Interest
Recorded: 2024-02-22
Pages: 8
Assignors
IKEDA, TARO
Executed: 2024-02-08
OSADA, YUKI
Executed: 2024-02-08
MIYASHITA, HIROYUKI
Executed: 2024-02-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus