Patent Assignment
Reel/Frame 066543/0138
Assignment of Assignor's Interest
Recorded: 2024-02-23
Pages: 6
Assignors
WU, SHENG-WEI
Executed: 2021-12-17
TSAI, YUNG-LI
Executed: 2021-12-21
CHEN, BO-CHEN
Executed: 2022-02-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Apparatus And Method For Wafer Cleaning